Ferroelectric and Ferroelastic Domain Related Formation and Influential Mechanisms of Vapor Deposited Piezoelectric Thin Films
نویسندگان
چکیده
Compared to the bulk piezoelectric materials counterpart, thin films (PTFs) possess advantages of smaller size, lower power consumption, better sensitivity, and have broad application in advanced micro-electro-mechanical system (MEMS) devices. However, performance MEMS transducers actuators are largely limited by PTFs properties. In this review, we focus on understanding structure-property relationship vapor deposited PTFs, with emphasis effect strain energy electrostatic films, especially, relaxation induced misfit dislocation ferroelectric (FS) ferroelastic (FC) domain formation mechanisms. We then discuss microstructure these domains their influential mechanisms properties, as well engineering strategies (i.e., internal external stimuli). This review will motivate further experimental, theoretical, simulation studies FS FC PTFs.
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ژورنال
عنوان ژورنال: Coatings
سال: 2021
ISSN: ['2079-6412']
DOI: https://doi.org/10.3390/coatings11121437